Methods of forming electrically conductive interconnections and electrically interconnected substrates

ABSTRACT

Methods of forming electrically conductive interconnections and electrically interconnected substrates are described. In one implementation, a first substrate having an outer surface is provided and a layer of material is formed thereover. Openings are formed within the layer of material and conductive masses are formed within the openings. A second substrate having conductive interconnect surfaces is provided. The conductive interconnect surfaces are then contacted with the conductive masses and deformed thereby. In one aspect, the interconnect surfaces are deformed in part by portions of the layer of material proximate the conductive masses. In another aspect, the layer of material is removed and the interconnect surfaces are deformed by the conductive masses themselves.

TECHNICAL FIELD

[0001] This invention relates to methods of forming electrically conductive interconnections and electrically interconnected substrates.

BACKGROUND OF THE INVENTION

[0002] One method of integrated circuit interconnection is called flip chip bonding. Here, bumps of solder or other conductive material are deposited onto conductive pads of a semiconductor wafer or chip. After separation of individual dies from the wafer, the individual dies or chips are turned upside down, and the bumps are properly aligned ii with a metallization pattern on another substrate. The aligned bumps are then joined to appropriate points on the pattern.

[0003] This invention arose out of concerns associated with improving flip chip bonding techniques and the substrates which are interconnected thereby.

SUMMARY OF THE INVENTION

[0004] Methods of forming electrically conductive interconnections and electrically interconnected substrates are described. In one implementation, a first substrate having an outer surface is provided and a layer of material is formed thereover. Openings are formed within the layer of material and conductive masses are formed within the openings. A second substrate having conductive interconnect surfaces is provided. The conductive interconnect surfaces are then contacted with the conductive masses and deformed thereby. In one aspect, the interconnect surfaces are deformed in part by portions of the layer of material proximate the conductive masses. In another aspect, the layer of material is removed and the interconnect surfaces are deformed by the conductive masses themselves.

BRIEF DESCRIPTION OF THE DRAWINGS

[0005] Preferred embodiments of the invention are described below with reference to the following accompanying drawings.

[0006]FIG. 1 is a diagrammatic sectional view of a semiconductor wafer fragment undergoing processing in accordance with one implementation of the invention.

[0007]FIG. 2 is a view of the FIG. 1 wafer fragment at a different processing step.

[0008]FIG. 3 is a view of the FIG. 1 wafer fragment at a different processing step.

[0009]FIG. 4 is a view of the FIG. 1 wafer fragment at a different processing step.

[0010]FIG. 5 is a view of the FIG. 1 wafer fragment at a different processing step.

[0011]FIG. 6 is a view of the FIG. 1 wafer fragment at a different processing step.

[0012]FIG. 7 is a view of the FIG. 1 wafer fragment undergoing processing in accordance with another implementation of the invention.

[0013]FIG. 8 is a view of the FIG. 7 wafer fragment at a different processing step.

[0014]FIG. 9 is a view of the FIG. 7 wafer fragment at a different processing step.

[0015]FIG. 10 is a view of the FIG. 7 wafer fragment at a different processing step.

[0016]FIG. 11 is a view of the FIG. 7 wafer fragment at a different processing step.

[0017]FIG. 12 is a view of the FIG. 7 wafer fragment at a different processing step.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0018] This disclosure of the invention is submitted in furtherance of the constitutional purposes of the U.S. Patent Laws “to promote the progress of science and useful arts” (Article 1, Section 8).

[0019] Referring to FIG. 1, a semiconductor wafer fragment is shown generally at 10 and comprises a semiconductive substrate 12 which supports integrated circuitry which is not specifically shown. A pair of integrated circuitry bond pads 14, 16 are formed within and supported by substrate 12. The illustrated bond pads are disposed below a substrate outer surface 18. For purposes of the ongoing discussion, substrate 12 constitutes a first substrate.

[0020] Referring to FIG. 2, a layer of material 20 is formed over outer surface 18 and bond pads 14, 16. The illustrated layer has a generally planar outer surface 22. Exemplary materials for layer 20 include insulative materials and/or photoresist. Layer 20 is formed to a height over outer surface 18 which is a desired height for conductive masses which are to be subsequently formed. An exemplary height is between about 10-30 μm.

[0021] Referring to FIG. 3, portions of layer 20 are removed thereby forming openings 24, 26 and outwardly exposing selected substrate portions which include respective bond pads 14, 16. If layer 20 is photoresist, it would simply be patterned and portions removed in accordance with conventional photoresist processing. If layer 20 is a material other than photoresist, it would be patterned and etched accordingly.

[0022] Referring to FIG. 4, conductive material is provided into the openings and forms respective conductive masses 28, 30 received within layer 20. The conductive material replaces the portions of layer 20 which were removed to form openings 24, 26. In one aspect, the conductive material which comprises each mass is homogeneously distributed within layer 20 sufficiently to fill the respective openings. To achieve adequate filling of the openings, a non-solidified conductive material such as a silver-filled polymer epoxy material can be used. Exemplary methods for filling openings 24, 26 include stencil printing and screen printing. In addition, conductive material can be deposited into the openings and over the substrate and subsequently planarized as by chemical-mechanical or other polishing. If necessary, the substrate can be exposed to conditions, such as curing conditions, which are effective to harden the conductive material within openings 24, 26.

[0023] The illustrated masses have outermost surfaces which include respectively, outwardly exposed uppermost surface portions 32, 34 and sidewalls or sidewall portions 36, 38. Uppermost surface portions 32, 34 are generally planar and coplanar with proximate portions of outer surface 22. The individual sidewall portions for each mass face generally oppositely one another and extend generally transversely away from the substrate where each joins therewith.

[0024] Referring to FIG. 5, substrate 12 is inverted or flipped over a second substrate 40. Second substrate 40 includes an outer surface 42. A pair of conductive structures 44, 46 are formed over substrate 40 and comprise respective conductive interconnect surfaces 48, 50. The interconnect surface of each structure defines a respective shape which extends away from outer surface 42 and includes respective uppermost surfaces 52, 54. The uppermost surfaces face generally away from substrate 40 and join with respective sidewalls 56, 58. Structures 44, 46 have a surface area consisting of a first portion which makes physical contact with outer surface 42. The first portion corresponds to that portion of a structure's surface area which is disposed atop and in physical contact with substrate 40. The structures also include a second portion which does not make physical contact with substrate 40. Such second portions include first surface areas A, A′ which are defined by uppermost surfaces 52, 54 respectively and sidewalls 56, 58. The second portions are substantially outwardly exposed. The uppermost surfaces also define respective first heights h₁ over outer surface 42. In one aspect, structures 44, 46 comprise homogeneously distributed conductive material.

[0025] Referring to FIG. 6, the substrates are moved toward one another and the respective interconnect surfaces 48, 50 (FIG. 5) are physically contacted with the outermost surfaces of respective masses 30, 28. Such moving changes the shapes of conductive structures 44, 46 and accordingly deforms interconnect surfaces 48, 50. In the illustrated example, the conductive structures are squeezed between the first and second substrates. This generally flattens the structures relative to the structures' shapes. Portions 22 a of outer surface 22 also engage the conductive structures to effect the deformation thereof. Such deformation effectively defines different respective uppermost surfaces 53, 55, and different sidewalls 57, 59. Uppermost surfaces 53, 55 respectively define different second surface areas A₁, A₁′ which are greater than first surface areas A, A′ respectively. Accordingly, uppermost surfaces 53, 55 define respective second heights h₂ which are less than first heights h₁.

[0026] Referring to FIG. 7, an alternate embodiment is set forth generally at 10 a. Like numerals from the above-described embodiment have been utilized where appropriate, with differences being indicated by the suffix “a” or with different numerals. Accordingly, a layer of material 20 a is formed over first substrate 12. Layer 20 a can be formed to a height from between about 100 μm to 200 μm.

[0027] Referring to FIG. 8, openings 24 a, 26 a are formed in layer 20 a and outwardly expose bond pads 14, 16.

[0028] Referring to FIG. 9, conductive masses 28 a, 30 a are formed over substrate 12 and received within layer 20 a. Accordingly, the masses have respective heights which are defined by each masses' vertically extending sidewalls 36 a, 38 a which are substantially the same as the height of layer 20 a, e.g., between about 100 μm to 200 μm.

[0029] Referring to FIG. 10, material of layer 20 a is removed sufficiently By to leave masses 28 a, 30 a over substrate 12. Layer 20 a can be removed through conventional techniques such as resist stripping (when photoresist is used) or through a selective etch of the layer relative to material of both the masses and the outer surface of substrate 12.

[0030] Referring to FIG. 11, a second substrate 40 a is provided with conductive structures 44 a, 46 a thereover. The conductive structures include uppermost surfaces 52 a, 54 a which define respective surface areas B, B′.

[0031] Referring to FIG. 12, substrates 12 and 40 a are moved toward each other and masses 30 a, 28 a are respectively extended into and deform conductive structures 44 a, 46 a. The masses are extended into the respective structures to below the uppermost surfaces 52 a, 54 a thereof a distance which is less than the respective height of each mass. The uppermost surface 34 a, 32 a of each mass is disposed closer to the second substrate than some portions of sidewalls 56 a, 58 a. Accordingly, the respective structures are bonded with the uppermost surface 52 a, 54 a of each mass, as well as a portion of at least one of the sidewalls of each mass. In the illustrated example, portions of each sidewall of each mass are bonded with the respective conductive structures. Accordingly, less than all of each mass sidewall has conductive material of an associated conductive structure disposed laterally adjacent thereto and is disposed laterally between respective structure sidewalls 56 a, 58 a. The portions of each mass which are not disposed within the conductive structures are disposed elevationally over those portions which are disposed within the conductive structures.

[0032] Each conductive structure 44 a, 46 a is deformed by and through |the engagement with the respective conductive interconnect surfaces of the conductive masses. Accordingly, such defines respective second surface areas B₁ (for conductive structure 44 a) and B₁′ (for conductive structure 46 a) which are less than the respective first surface areas B, B′ in FIG. 11.

[0033] The above-described embodiments provide flip chip bonding methods which improve upon techniques which are currently utilized. Material of layers 20, 20 a is easily formed through commonly-employed techniques and formation of the masses therewithin is thought to be much simpler and more cost effective than current methods. In addition, desirable epoxy connections can be achieved without significant additional capacitance.

[0034] In compliance with the statute, the invention has been described in language more or less specific as to structural and methodical features. It is to be understood, however, that the invention is not limited to the specific features shown and described, since the means herein disclosed comprise preferred forms of putting the invention into effect. The invention is, therefore, claimed in any of its forms or modifications within the proper scope of the appended claims appropriately interpreted in accordance with the doctrine of equivalents. 

1. A method of forming an electrically conductive interconnection comprising: providing a first substrate having an outer surface; providing a second substrate having a conductive interconnect surface; forming a layer of material over the first substrate outer surface; after forming the layer of material over the first substrate outer surface, forming a conductive mass of homogeneously distributed material within the layer of material, the layer of material having a substantially planar outer surface proximate the conductive mass, the conductive mass having an outermost surface which is generally coplanar with said outer surface of the layer; and physically contacting the conductive interconnect surface on the second substrate with the conductive mass outermost surface and deforming the conductive interconnect surface with the conductive mass outermost surface.
 2. The method of claim 1, wherein the conductive interconnect surface comprises an uppermost surface of a conductive structure on the second substrate and the deforming thereof comprises extending the conductive mass into the uppermost surface and below at least a portion thereof.
 3. The method of claim 1, wherein the conductive interconnect surface comprises an uppermost surface of a conductive structure on the second substrate and the deforming thereof comprises engaging the uppermost surface with at least a portion of the outer surface of the layer of material.
 4. The method of claim 3, wherein the uppermost surface of the conductive interconnect surface defines a first surface area prior to the engaging thereof and a second surface area after the engaging thereof, the second surface area being greater than the first surface area.
 5. The method of claim 1 further comprising prior to contacting the interconnect surface, removing the layer of material.
 6. The method of claim 5, wherein the removing of the layer of material comprises selectively etching the layer of material relative to both the conductive mass and material of the first substrate outer surface.
 7. The method of claim 1, wherein the forming of the conductive mass comprises: forming an opening in the layer of material; and filling the opening with conductive material.
 8. The method of claim 7, wherein the filling of the opening comprises stencil printing the conductive material into the opening.
 9. The method of claim 7, wherein the filling of the opening comprises screen printing the conductive material into the opening.
 10. The method of claim 7, wherein the filling of the opening comprises forming conductive material over the planar outer surface of the layer of material and planarizing the conductive material relative to the layer of material.
 11. A method of forming an electrically conductive interconnection comprising: providing a first substrate having an outer surface; forming a layer of material over the outer surface; forming openings through the layer of material and exposing selected outer surface portions; forming a non-solidified conductive material within the openings and exposing the first substrate to conditions effective to harden the conductive material and form masses of conductive material within the respective openings, at least one of the masses having a generally planar, outwardly exposed outermost surface; providing a second substrate having a homogeneous conductive structure disposed thereover, the homogeneous conductive structure having an outwardly exposed uppermost surface which faces generally away from the second substrate and defines a first conductive structure surface area; engaging the conductive structure's uppermost surface with the planar outermost surface of the one mass; and deforming at least a portion of the conductive structure with the planar outermost surface sufficient to define a second conductive structure surface area which is substantially different from the first conductive structure surface area.
 12. The method of claim 11, wherein the non-solidified conductive material comprises a generally homogeneous conductive material.
 13. The method of claim 11, wherein the second conductive structure surface area is greater than the first conductive structure outermost surface area.
 14. The method of claim 11, wherein the second conductive structure surface area is less than the first conductive structure outermost surface area.
 15. The method of claim 11, wherein prior to the engaging, the conductive structure uppermost surface defines a first height over a second substrate outer surface, and subsequent to the engaging defines a second height over the second substrate outer surface which is less than the first height.
 16. The method of claim 11, wherein the generally planar outermost surface of the one mass is coplanar with an outer surface of the layer of material.
 17. The method of claim 16, wherein the engaging of the conductive structure's uppermost surface comprises engaging said surface with at least a portion of the outer surface of the layer of material.
 18. A method of forming an electrically conductive interconnection comprising: providing a first substrate having an outer surface; forming a layer of material over the outer surface; forming a conductive mass of material over the outer surface and received within the layer of material; removing the layer of material and leaving the conductive mass over the outer surface; and extending the conductive mass into a conductive structure on a second substrate, at least a portion of the conductive mass having material of the conductive structure disposed laterally adjacent thereto.
 19. The method of claim 18, wherein the conductive mass comprises an outermost surface having an uppermost surface portion and a sidewall portion which joins therewith and extends between the uppermost surface portion and the first substrate's outer surface, and wherein the portion of the conductive mass having material of the conductive structure disposed laterally adjacent thereto comprises the sidewall portion.
 20. The method of claim 19, wherein the portion of the conductive mass having material of the conductive structure disposed laterally adjacent thereto comprises less than all of the sidewall portion.
 21. The method of claim 19, wherein the sidewall portion is generally vertically disposed over the first substrate's outer surface and defines a height thereover from between about 100 μm to 200 μm.
 22. The method of claim 19, wherein the sidewall portion is generally vertically disposed over the first substrate's outer surface and defines a height thereover of not more than about 200 μm.
 23. The method of claim 22, wherein the portion of the conductive mass having material of the conductive structure disposed laterally adjacent thereto comprises less than all of the sidewall portion.
 24. A method of forming an electrically conductive interconnection comprising: providing a first substrate having an outer surface; forming a layer of material over the outer surface; forming a conductive mass of material received within the layer of material, the conductive mass having a generally planar uppermost surface; after forming the conductive mass having the generally planar uppermost surface, removing the layer of material and leaving the conductive mass over the outer surface; and engaging the planar uppermost surface of the conductive mass with a conductive structure on a second substrate, the conductive structure having an interconnect surface which includes at least one sidewall which extends away from a second substrate surface, the planar uppermost surface of the conductive mass extending through the conductive structure's interconnect surface and being disposed laterally of the one sidewall.
 25. The method of claim 24, wherein the conductive mass includes a portion which is received entirely within the conductive structure.
 26. The method of claim 24, wherein the conductive mass defines a height over the first substrate's outer surface from between about 100 μm to 200 μm.
 27. The method of claim 24, wherein the conductive mass includes a portion which is disposed within the conductive structure and a portion which is not disposed within the conductive structure.
 28. The method of claim 27, wherein the conductive mass portion which is not disposed within the conductive structure extends elevationally over the conductive mass portion which is disposed within the conductive structure.
 29. A method of forming an electrically conductive interconnection comprising: providing a first substrate having an outer surface; forming a conductive mass of material over the outer surface, the conductive mass having a pair of generally oppositely-facing sidewalls joined with the substrate and extending generally transversely away therefrom and a generally planar uppermost surface joined with the sidewalls and extending therebetween; providing a second substrate having an outer surface and a conductive structure disposed over the second substrate's outer surface, the conductive structure having a surface area consisting of a first portion which makes physical contact with the second substrate's outer surface, and a second portion which does not make physical contact with the second substrate's outer surface, the second portion being substantially outwardly exposed; and extending the conductive mass of material into the conductive structure over the second substrate's outer surface and bonding the conductive structure with both (a) at least a portion of the uppermost surface of the conductive mass, and (b) at least a portion of one of the sidewalls of the conductive mass.
 30. The method of claim 29, wherein the bonding of the conductive structure comprises bonding said structure with at least a portion of both of the sidewalls of the conductive mass.
 31. The method of claim 29, wherein the conductive structure second portion comprises a sidewall and the portion of the one conductive mass sidewall is disposed laterally proximate the conductive structure sidewall.
 32. The method of claim 29, wherein: the bonding of the conductive structure comprises bonding said structure with at least a portion of both of the sidewalls of the conductive mass; and the conductive structure second portion comprises a pair of sidewalls, the bonded portions of the sidewalls of the conductive mass being disposed laterally between the conductive structure sidewalls.
 33. The method of claim 29, wherein the sidewalls of the conductive mass define a height over the first substrate's outer surface and the extending of the conductive mass into the conductive structure comprises extending the conductive mass into said structure a distance which is less than the height of the conductive mass.
 34. The method of claim 33, wherein the height is from about 100 μm to 125 μm.
 35. A method of forming an electrically conductive interconnection comprising: providing a first substrate having an outer surface; providing a second substrate having a conductive interconnect surface; forming an insulative layer of material over the first substrate's outer surface; removing a portion of the insulative layer; forming conductive material over the first substrate and replacing the removed portion of the insulative layer, the insulative layer of material and the conductive material having respective portions which define generally planar surfaces proximate and coplanar with one another; and contacting the planar surfaces of the conductive material and the insulative layer of material with the second substrate's conductive interconnect surface.
 36. The method of claim 35, wherein the forming of the conductive material comprises screen printing said material over the first substrate.
 37. The method of claim 35, wherein the forming of the conductive material comprises stencil printing said material over the first substrate.
 38. The method of claim 35, wherein: the conductive interconnect surface comprises a conductive structure having a shape which extends away from a second substrate outer surface; and the contacting comprises moving the first substrate toward and against the conductive structure sufficient to change the conductive structure shape.
 39. The method of claim 38, wherein the moving comprises squeezing the conductive structure between the first and second substrates, the changed conductive structure shape defining a generally flattened structure relative to the conductive structure shape prior to the moving.
 40. A pair of electrically interconnected substrates comprising: a first substrate having an outer surface; a conductive mass of material disposed over the outer surface and having a generally planar uppermost surface; a second substrate having a conductive structure disposed thereon, the conductive structure having a planar uppermost interconnect surface and sidewalls which are joined with the interconnect surface and extend between the interconnect surface and the second substrate, the sidewalls and interconnect surface being outwardly exposed; and the conductive mass of material being received within the conductive structure, the uppermost surface of the conductive mass being disposed closer to the second substrate than the conductive structure's interconnect surface.
 41. The substrates of claim 40, wherein the conductive mass is received laterally between the conductive structure's sidewalls.
 42. A pair of electrically interconnected substrates comprising: a first substrate having an outer surface; a conductive mass of material disposed over the outer surface and having a generally planar uppermost surface; a second substrate having an outer surface and a conductive structure disposed thereon, the conductive structure having a conductive structure surface area consisting of a first portion which makes physical contact with the second substrate's outer surface and a second portion which does not make physical contact with the second substrate's outer surface, the second portion being defined at least in part by outwardly-exposed, generally vertically-extending sidewalls which extend away from the second substrate's outer surface; and the conductive mass of material being received within the conductive structure, the uppermost surface of the conductive mass being disposed closer to the second substrate outer surface than at least some portions of the vertically-extending sidewalls.
 43. The substrates of claim 42, wherein the conductive mass is received laterally between the vertically-extending sidewalls.
 44. A pair of electrically interconnected substrates comprising: a first substrate having an outer surface; a layer of material disposed over the first substrate's outer surface and having a material outer surface disposed over the first substrate's outer surface; a conductive mass of material received with the layer of material and having a generally planar uppermost surface which is generally coplanar with the material outer surface; and a second substrate having a conductive structure disposed thereon, the conductive structure having a conductive structure uppermost surface, the uppermost surface of the conductive mass and at least a portion of the outer surface of the layer of material being disposed in physical relation with the conductive structure uppermost surface. 